AXSYS AL120-12-WM

12" wafer handler and Wafer Mapping

Application characteristics：

• For Wafer handling and inspection of 12 ' wafer, integrate the electric table, automatic OCR, Wafer Alignment, and cooperate with the unique Wafer mapping system.
• You can read the wafer mapping of the previous station, review, bincode editing, etc., and continue to upload the mapping to the next station.
• Programmable automatic position, photo, reduce the artificial load.

System advantage ：

• Olympus AL-120-12 wafer handler platform
• Olympus MX63 microscope
• 300mm X 300mm electric platform
• Z axis auto-focus
• Auto wafer Alignment
• OCR Wafer ID reading
• Editable wafer map, and suitable for various SEMI-standard formats
• Bincode generation and configuration
• SECS/GEM connection