AXSYS AL120-WM

4"/6"/8" Wafer Handler and Wafer Mapping

Application characteristics：

• For Wafer handling and inspection of 4"/6"/8"wafer, integrate the electric table, automatic OCR, Wafer Alignment, and cooperate with the unique Wafer mapping system.

• You can read the wafer mapping of the previous station, review, bincode editing, etc., and continue to upload the mapping to the next station.

• Programmable automatic position, photo, reduce the artificial load.

System advantage:

• Olympus AL-120 wafer handler platform
• Olympus MX63 microscope
• 200mm X 200mm electric platform
• Z axis auto-focus
• Auto wafer Alignment
• OCR Wafer ID reading
• Editable wafer map, and suitable for various SEMI-standard formats
• Bincode generation and configuration
• SECS/GEM connection
• With Ring wafer handler / visual inspection equipment