AXSYS AX120

6"/8"/12" Wafer Review System/ Verify Rework Station

• 6"/8"/12" wafer handling and inspection, integrate the electric table, automatic OCR, Wafer Alignment, and cooperate with the unique Wafer mapping system.
• You can read the wafer mapping of the previous station, review, bincode editing, etc., and continue to upload the mapping to the next station.
• Could be equipped with multi-load Ports to realize the Wafer Sorter function.

• Equipped with 1 or 2 or 3-axis robot
• Olympus MX63 microscope
• 300mm X 300mm electric platform
• Z axis auto-focus
• Auto wafer Alignment
• OCR Wafer ID reading
• Editable wafer map, and suitable for various SEMI-standard formats
• Bincode generation and configuration
• SECS/GEM connection
• Class 1 minienvironment