AXSYS WS300/WS200

6"/8"/12"wafer Sorter

• Sorter for 6"/8"/12" wafer，A single system can be used for kinds of different size of wafers, thicknesses and warps.
• Various kinds of cassettes can be transferred to each other, two sets of mechanical arms can be equipped, and three wafer loading ports can be used for high-speed sorting.

System advantages：

• Designed specifically to handle 2 wafer load ports and can be upgraded to 3 load ports.
• Programmable loading and unloading wafers directly from different combinations of loading ports seamlessly
• Able to perform bidirectional wafer sorting from OC to OC or FOUP or FOSB and vice versa
• Supports Wafer Coin Box to FOUP/FOSB
• OCR Wafer ID read
• Automatic Wafer Alignment
• SECS/GEM or TCP/IP connection