What is SIRD SIRD is Scanning Infra-Red Depolarization. SIRD measures stress in optically transparent materials utilizing a non-contact and non-destructive technology for: --Si wafers up to 300mm --Compound materials --Solar cells Why SIRD...

What is the bevel scan? Bevel scan is VPD solution scan the edge of wafer 1 to 5 mm to collect the metal of wafer edge (include wafer surface and backside. Why Bevel scan needed? Reason is: 1. To verify if the cassette is clean, as wafer ed...